Details

Laser systems for semiconductor manufacturing must be continuously improved in terms of economic and ecological efficiency. The extraordinary complexity of these systems requires the intensive and comprehensive use of optimization software. In this presentation, you will learn how to optimize multiphysics workflows with Ansys optiSLang.

Benefits

A multiphysics workflow in optiSLang is presented using the example of reflective high-performance optics. This includes the complete coupling of a parameter-based geometry generation in SpaceClaim, a thermal steady-state flow simulation in Fluent, a thermo-mechanical analysis in Mechanical and a constructive optical analysis in Zemax. Thereby, the optical behavior is realistically represented and evaluated.

Target Group

• Users 
• Decision makers 
• Generally interested 
• Designers 

Agenda

• Optimization of the geometric shape of the optics with respect to its optical properties  
• Evaluation of the robustness in operation 
• Presentation of the workflow and its results, as well as hints for efficient modeling (lessons learned)